Abstract:
This paper analyses the key points of the preparation of high-purity alumina ceramic substrates, sorting out the relationship between the key preparation processes and the substrate characteristics, analysing the verification requirements of high-purity alumina ceramic substrates for star applications, and finally proposing a verification concept for high-purity alumina substrates, i.e. a three-level verification index system based on dividing all verification items into two major categories: component level and assembly level. The paper also provides a detailed analysis and discussion of the design and practice of specific validation projects. The paper concludes that the validation process, which is based on the framework of existing standards and test principles but not on a specific standard, is not only suitable for the verification of batch stability and process suitability at component level, but also for the determination of validation items and specific test methods at component level. In order to ensure comprehensive and accurate verification at both component and assembly level, and to ensure high verification efficiency and low verification costs, it is necessary to consider and refine the verification project conditions in conjunction with the standard, test conditions and application conditions.