p-GaN/n-Ga2O3结终端延伸肖特基二极管结构仿真研究

    Simulation of p-GaN/n-Ga2O3 junction terminal extended Schottky barrier diode

    • 摘要: 由于缺少p型氧化镓,造成调制电场十分有效的pn结结终端延伸(junction terminal extension,JTE)结构无法使用,提出采用p-GaN与n-Ga2O3之间形成pn结JTE结构,有效解决了这一问题。同时为进一步提升氧化镓肖特基二极管击穿电压提供理论指导,运用Silvaco软件对p-GaN/n-Ga2O3结终端延伸肖特基二极管(schottky barrier diode,SBD)进行了仿真研究,通过与对照肖特基二极管对比发现采用p-GaN/n-Ga2O3 JTE结构的SBD击穿电压由880V增加到1349V,代价是器件正向导通电阻略微增加,由4.68mΩ·cm2增至5.62mΩ·cm2。探究了p-GaN深度对肖特基二极管特性的影响,发现p-GaN深度由0.3μm增加到1.2μm,器件击穿电压由1349V进一步提升到1685V,同时器件导通电阻基本不发生变化。通过仿真实验证明了p-GaN/n-Ga2O3 JTE结构提升SBD反向击穿特性的可行性。

       

      Abstract: Due to the lack of p-type gallium oxide, the pn junction terminal extension structure (JTE), which is highly effective in modulating the electric field, cannot be used. This article proposes the use of p-GaN and n-Ga2O3 to form a pn junction JTE structure, effectively solving this problem. In order to provide theoretical guidance for further improving the breakdown voltage of gallium oxide Schottky barrier diodes (SBD), in this article, Silvaco software was used to simulate the p-GaN/n-Ga2O3 JTE SBD. Compared with the control SBD , it was found that the breakdown voltage of the p-GaN/n-Ga2O3 JTE SBD increased from 880V to 1349V, at the cost of slightly increasing the forward conduction resistance of the device. The influence of p-GaN depth on the characteristics of SBD is investigated. It is found that the p-GaN depth is from 0.3μm increased to 1.2μm, the breakdown voltage of the device is further increased from 1349V to 1685V, and the Ron of the device is basically unchanged. This paper proves the feasibility of p-GaN/n-Ga2O3 JTE structure to improve the reverse breakdown characteristics of SBD through simulation experiments.