Abstract: This article reviews the development history and current research status of on-chip RF probes, with a focus on introducing probe types from various development stages. It compares the characteristics of various probes, the highest working-frequencies, and their fabrication methods. The article introduces the millimeter wave probe based on rectangular micro-coaxial technology researched by the author's team. There has been a detailed discussion on the micro-coaxial probe for the W-band previously. Based on this, the article reports on the latest research on D-band probes and provides an overview of their fabrication process. Finally, the performance of the probe was tested. The experimental results demonstrate that the RF performance of the probe matches well with the simulation results and features an integrated tip formation, quick replacement capability, and low loss.